Introduction11 Plasma diagnosis (RGA) Ionization (by passing an electric current through the filament, accelerating the released hot electrons and colliding with neutrons or atoms). Quadruple mass filter consists of 4 parallel metal rods and makes 2 pairs by electrically connecting two opposite electrodes and applies voltages (DC, RF) of different polarities to each other. Ions of the selected mass (mass/charge) pass through the qua.. 2020. 8. 26. Plasma diagnosis (OES) The optical emission spectroscopy(OES) is a measurement method utilizing a property having a specific wavelength or range when the electrons of an element existing in the plasma fall from the excited state to the ground state. Through the analysis of the specific wavelength obtained, it is possible to estimate the amount of the element by grasping the element present in the plasma and changing t.. 2020. 8. 26. Plasma diagnosis (DLP) Double Langmuir probe(DLP) is a device that can measure ion density, electron temperature and ion saturation current. It consists of two metal probes, a variable power source that can apply voltage to the probe, and a device that can measure the current flowing through the probe. As in the single Langmuir probe, the double Langmuir probe shows an I-V characteristic curve that represents the curr.. 2020. 8. 26. Inductively Coupled Plasma (ICP etcher) An inductively coupled plasma is a type of plasma source in which are produced by electromagnetic induction, that is, by time-varying magnetic fields. Our ICP etching system consists of an RF power supply, a vacuum chamber, a flow rate and pressure control device, and a vacuum measurement device. The power supply device is composed of an RF generator and an impedance matching circuit which outpu.. 2020. 8. 26. plasma application laboratory 고려대학교 플라즈마 응용 연구실 Korea University Plasma Application Laboratory 본 연구실은 2005년 개설된 연구실이지만 매년 활발한 연구활동을 통하여 SCI논문 10여편 이상을 지속적으로 발표하고 있어 연구성과를 인정받고 있으며 기업 등과 연구개발 협력을 지속적으로 확대해가고 있는 연구실이다. 연구실에서 주로 다루고 있는 플라즈마 기술은 현재 반도체 산업 뿐만 아니라 광범위한 산업분야에 적용되고 있다. 이에 플라즈마 기초연구를 기반으로 한 응용연구는 그 뿌리가 되는 플라즈마에 대한 깊이 있는 연구를 통해서 다양한 산업분야의 발전에 기여하고, 나아가 인류산업 발전에 기여하고있다. 이에 따라 본 연구실은 플라즈마 기초연구와 응용연구를 병행하여 플라즈마 기술의 응용분야를.. 2014. 9. 1. 이전 1 2 다음
