Reseach Area/Thin film deposition2 Related paper 1) Taehoon Lee, Nam-Ki Min, Hyun Woo Lee, JinNyoung Jang, DongHyuck Lee, MunPyo Hong, and, Kwang-Ho Kwon, “The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process”, Thin Solid Films, Vol. 517, Issue 14, 3999-4002 https://doi.org/10.1016/j.tsf.2009.01.112 Redirecting linkinghub.elsevier.com 2) Sun Gyu Choi, Tae-Jung Ha, Hyung-.. 2020. 8. 28. Thin film deposition Thin Film Deposition is the technology of applying a very thin film of material – between a few nanometers to about 100 micrometers, or the thickness of a few atoms – onto a “substrate” surface to be coated, or onto a previously deposited coating to form layers. Thin Film Deposition manufacturing processes are at the heart of today’s semiconductor industry, solar panels, CDs, disk drives, and op.. 2020. 8. 27. 이전 1 다음
