Related paper
1) Taehoon Lee, Nam-Ki Min, Hyun Woo Lee, JinNyoung Jang, DongHyuck Lee, MunPyo Hong, and, Kwang-Ho Kwon, “The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process”, Thin Solid Films, Vol. 517, Issue 14, 3999-4002 https://doi.org/10.1016/j.tsf.2009.01.112 Redirecting linkinghub.elsevier.com 2) Sun Gyu Choi, Tae-Jung Ha, Hyung-..
2020. 8. 28.
