전체 글179 Jinhyuk Kim Name : Jinhyuk Kim Degree : M.S candidate E-mail : kimjh9621@korea.ac.kr Research area : High aspect ratio oxide etching characteristics using C6F12O with low-GWP and comparative study of 2 MHz and 13.56 Mhz Published. 1) Jinhyuk Kim, Gilyoung Choi, and Kwang0Ho Kwon, : “High-aspect-ratio oxide etching using CF4/C6F12O) plasma in an inductively coupled plasma etching system with low-frequency bi.. 2023. 11. 13. Gil-Young Choi Name : Gil-Young Choi Degree : Ph. D. Candidate E-mail : confidencism@korea.ac.kr Research area : A study on the high-aspect-ratio oxide etching characteristics using a Hexafluoroisobutylene with a low global warming potential 2023. 11. 13. SCI Paper List I. International Journal(SCI) (1991 ~ ) (164 papers) 1990--------------------------------------------------------------------------------------- 1. Sun Jin Yun, Kwang-Ho Kwon, Byung-Sun Park, Young-Jin Jeon, and Sang-Won Kang, "The formation of resist profile by TMSDEA-treatment and dry development based on oxygen-helium RIE", Microelectronic Engineering, Vol. 13, 115(1991) 2. Hyung-Ho Park, Kwa.. 2023. 11. 13. Main photo #4 2020. 9. 23. Main photo #5 2020. 9. 23. IOP publishing 1st trust reviewer (20.09.23) Achieving IOP trusted reviewer status. (IOP publishing에서 인정하는 첫 번째 평가자) 2020. 9. 23. 이전 1 2 3 4 ··· 30 다음
