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Reseach Area/Plasma treatment

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by 플라즈마응용연구실 2020. 8. 28.

1) Kwang-Ho Kwon, Sun Jin Yun, Chang-Il Kim, Jong-Moon Park, Kyu-Ha Baek, Yong-Sun Yoon, Sang-Gi Kim, and Kee-Soo Nam, “The effects of fluorine passivation using SF6 plasma on the corrosion of Al(Cu 1%) at grain boundaries”, J. Electrochem. Soc., Vol. 145, No. 3. March pp. 1044 - 1048 (1998) https://iopscience.iop.org/article/10.1149/1.1838386/meta

 

The Effects of Fluorine Passivation Using  SF 6 Plasma on the Corrosion of Al(Cu 1%) at Grain Boundaries - IOPscience

 

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2) Kyu-Ha Baek, Yong -Sun Yoon, Jong-Moon Park, Kwang-Ho Kwon, Chang-Il Kim, and Kee-Soo Nam, "A fluorine-related passivation layer on the etched Al-Cu(1%) alloy surface after SF6 plasma treatments", Materials Letters, 35, pp. 183 187, (1998) https://doi.org/10.1016/S0167-577X(97)00243-7

 

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3) Kyu-Ha Baek, Chang-il Kim, Kwang-Ho Kwon ,Tae-Hyung Kim, Eui-Goo Chang, Sun Jin Yun, Sang-Gi Kim, Yong-Sun Yoon, and Kee-Soo Nam, “Passivation role of fluorine on the anticorrosion of AlCu films after plasma etching”, Journal of Vacuum Science & Technology A, vol. 16, no. 3, Part II, pp. 1469 1472, (1998) https://doi.org/10.1116/1.581171

 

Passivation role of fluorine on the anticorrosion of AlCu films after plasma etching

To eliminate corrosion, a subsequent treatment of SF6 plasma after an Al–Cu etching has been carried out. X-ray photoelectron spectroscopy (XPS) studies showed that the F content on the Al–Cu alloy...

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4) Yong-Sun Yoon, Kyu-Ha Baek, Jong-Moon Park, Kwang-Ho Kwon, Chang-Il Kim, and In-Gab Hwang, “Angle-resolved XPS investigation of the fluorine-related passivation layer on etched Al(Cu 1%) surface after SF6 treatment”, Journal of Korean Physical Society, vol. 34, July 1999, pp. S305 S309 https://link.springer.com/journal/40042/volumes-and-issues

 

Journal of the Korean Physical Society | Volumes and issues

Volumes and issues listings for Journal of the Korean Physical Society

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5) Sang-Ki Kim, Kyu-Ha baek, Jongdae Kim, Jin-Gun Koo, Dae-Yong Kim, In-Soo Kim, Kwang-Ho Kwon, and Chang-Il Kim, “Suppression of Corrosion Phenomenon on Al-1%Cu Surface with Fluorine Treatment”, Journal of Korean Physical Society, vol. 35, July 1999, pp. S357 S360 https://link.springer.com/journal/40042/volumes-and-issues

 

Journal of the Korean Physical Society | Volumes and issues

Volumes and issues listings for Journal of the Korean Physical Society

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6) Kyu-Ha Baek, Yong-Sun Yoon, Jong-Moon Park, Kwang-Ho Kwon, Chang-Il Kim, and Kee-Soo Nam, “Corrosion at the Grain Boundary and a Fluorine-Related Passivation Layer on Etched Al-Cu(1%) Alloy Surfaces”, ETRI Journal, vol. 21, no. 3, September, pp. 16 21, 1999 https://doi.org/10.4218/etrij.99.0199.0303

 

7) Dmitriy A. Shutov, Seung-Youl Kang, Kyu-Ha Baek, Kyung Soo Suh, and Kwang-Ho Kwon, “Influence of Ar and NH3 Plasma Treatment on Surface of Poly (monochloro-para-xylylene) Dielectric Films Processed in Oxygen Plasma”, Japanese Journal of Applied Physics, Vol. 47, No. 8, 2008, pp. 6970 6973 https://doi.org/10.1143/JJAP.47.6970

 

Influence of Ar and NH3 Plasma Treatment on Surface of Poly(monochloro-para-xylylene) Dielectric Films Processed in Oxygen Plasm

The surface of the poly(monochloro-para-xylylene) (parylene-C) films after O2 plasma and successive Ar and NH3 plasma treatment was investigated using a contact angle and an X-ray photoelectron spectroscopy (XPS) measurement. In this work, it was confirmed

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8) Yong-Hyun Ham, Dmitriy Alexandrovich Shutov, Kyu-Ha Baek, Lee-Mi Do, Kwangsoo Kim, Chi-Woo Lee, Kwang-Ho Kwon, “Surface characteristics of parylene-C films in an inductively coupled O2/CF4 gas plasma, Thin Solid Films, Volume 518 (2010) Pages 6378-6381 https://doi.org/10.1016/j.tsf.2010.03.138

 

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9) Yong-Hyun Ham, Dmitriy Alexandrovich Shutov, and Kwang-Ho Kwon, Surface characteristics of etched parylene-C films for low-damaged patterning process using inductively-coupled O2/CHF3 gas plasma”, Applied Surface Science 273 (2013) 287-292 https://doi.org/10.1016/j.apsusc.2013.02.033

 

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10) Hanbyeol Jang, Alexander Efremov, Sun Jin Yun, Geun Young Yeom, Kyoung Bo Kim, and Kwang-Ho Kwon, Degradation and Modification of Stainless-Steel Surface Using Cl2/Ar Inductively Coupled Plasma, Applied Surface Science (2013), pp. 41-45 https://doi.org/10.1016/j.apsusc.2013.03.175

 

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11) Jinyoung Son, Min-Sik Kim, Hyun Woo Lee, Jong-Sung Yu, and Kwang-Ho Kwon,

“Surface modification of polypropylene separators in lithium-ion batteries using inductively coupled plasma treatment.”, J. Nanosci. Nanotechnol. Vol. 14, 9368-9372, 2014 https://doi.org/10.1166/jnn.2014.10119

 

Surface Modification of Polypropylene Separators in Lithium-Ion B...: Ingenta Connect

We describe herein an improvement in the surface wettability of plasma-treated separators for use in lithium-ion batteries. We treated the separators with an O2/Ar inductively coupled plasma to increase their surface energy. The plasma treatment on the sep

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12) Nomin Lim, Daewoong Hong, Jaehwa Jeong, Hyun Woo Lee and Kwang-Ho Kwon, “Inductively Coupled Plasma Surface Modification of Polyethylene Terephthalate and Application in a Trib oelectric Generator” Thin Solid Films, Vol. 637, 27-31(2017) https://doi.org/10.1016/j.tsf.2017.03.034

 

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13) Yong Geun Kim, Nomin Lim, Jihun Kim, Changmok Kim, Junmyung Lee, Kwang-Ho Kwon, “Study on the surface energy characteristics of polydimethylsiloxane (PDMS) films modified by C4F8/O2/Ar plasma treatment”, Applied Surface Science, Vol. 31, 198-203, (2019) https://doi.org/10.1016/j.apsusc.2017.11.009

 

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14) Yong Geun Kim, Changmok Kim, Junmyung Lee, Hyun Woo Lee and Kwang-Ho Kwon, “Direct transfer of graphene by control of polydimethylsiloxane surface energy”, Thin Solid Films, Vol.697, 137847 (2020), 08, Feb. (2020) https://doi.org/10.1016/j.tsf.2020.137847

 

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