Related paper

1) Jaemin Lee, Changmok Kim, Hyun Woo Lee, and Kwang-Ho Kwon, “Sidewall chemistry of nano-contact patterns in C4F8+CH2F2+O2+Ar inductively coupled plasmas”, Thin Solid Films, Vol.669, 227-234, (2019). https://doi.org/10.1016/j.tsf.2018.11.009

Redirecting

 

2) Jaemin Lee, Hyun Woo Lee, Kwang-Ho Kwon, “Characteristics of etching residues on the upper sidewall after anisotropic plasma etching of silicon”, Applied Surface Science, Vol. 517, 146189 (2020) https://doi.org/10.1016/j.apsusc.2020.146189

Redirecting