Moonkeun Kim

Name : Moonkeun Kim
Graduate year : 2014
Degree : Ph. D
Affiliation : Samsung Electronics
E-mail : moonkeun@korea.ac.kr

Published

1) Moonkeun Kim, Alexander Efremov, Hyun Woo Lee, Nam Ki Min, Hyung-Ho Park, Kyu-Ha Baek, and Kwang-Ho Kwon, “Effect of Gas Mixing Ratio on Etch Behavior of Y2O3 Thin Films in Cl2/Ar and BCl3/Ar Inductively Coupled Plasmas” Japanese Journal of Applied Physics 49 (2010) 08JB04-1 http://doi.org/10.1143/JJAP.49.08JB04

Effect of Gas Mixing Ratio on Etch Behavior of Y2O3 Thin Films in Cl2/Ar and BCl3/Ar Inductively Coupled Plasmas - IOPscience

This paper reports the results of a model-based analysis of the etch mechanism for the Y2O3 thin films in the Cl2/Ar and BCl3/Ar inductively coupled plasma. It was found that the BCl3/Ar plasma provides higher etch rate (except the case of pure BCl3 and Cl

iopscience.iop.org

2) Moonkeun Kim, Alexander Efremov, Hyun Woo Lee, Hyung-Ho Park, Nam Ki Min, and Kwang-Ho Kwon, “HfO2 Etching Mechanism in Inductively-Coupled Cl2/Ar Plasma”, Thin Solid Films 519 (2011) 6708–6711. https://doi.org/10.1016/j.tsf.2011.04.059

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3) Moonkeun Kim, Hanbyeol Jang, Yong-Hwa Lee, Kwang-Ho Kwon, and Kang-Bak Park, “Modeling of an Inductively Coupled Cl2/Ar Plasma Using Neural Network”, Thin solid films 521 (2012) 38– 41 https://doi.org/10.1016/j.tsf.2012.03.076

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4) Moonkeun Kim, Hanbyeol Jang, Yong-Hwa Lee, Kwang-Ho Kwon, and Kang-Bak Park, “Modeling of electron temperature and DC bias voltage in an inductively-coupled Cl2/Ar plasma using neural network”, Surface & Coatings Technology 231 (2013) 546–549 https://doi.org/10.1016/j.surfcoat.2012.07.040

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5) Moonkeun Kim, Beomseok Hwang, Nam Ki Min, Jaehwa Jeong, Kwang-Ho Kwon, and Kang-Bak Park, “Design and fabrication of a PZT cantilever for low frequency vibration energy harvesting”, Journal of Nanoscience and Nanotechnology, Vol. 11, 6510-6513, 2011. https://doi.org/10.1166/jnn.2011.4324

Design and Fabrication of a PZT Cantilever for Low Frequency Vibr...: Ingenta Connect

In this study, a PZT cantilever with a Si proof mass is designed and fabricated for a low frequency energy harvesting application. A mathematical model of a multi-layer composite beam was derived and applied in a parametric analysis of the piezoelectric ca

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6) Moonkeun Kim, Sagn-Kyun Lee, Yong-Hyun Ham, Yil Suk Wang, Jong-Kee Kwon, and Kwang-Ho Kwon, “Vibration energy harvester with sustainable power based on a single-crystal piezoelectric cantilever array”, Journal of Nanoscience and Nanotechnology Vol. 12, 6283-6286, 2012. https://doi.org/10.1166/jnn.2012.6420

Vibration Energy Harvester with Sustainable Power Based on a Sing...: Ingenta Connect

We designed and fabricated a bimorph cantilever array for sustainable power with an integrated Cu proof mass to obtain additional power and current. We fabricated a cantilever system using single-crystal piezoelectric material and compared the calculations

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7) Moonkeun Kim, Beomseok Hwang, Jaehwa Jeong, Nam Ki Min, and Kwang-Ho Kwon, “Micromachining of a bimorph Pb(Zr,Ti)O3 (PZT) cantilever using micro electro mechanical systems (MEMS) process for energy harvesting application”, Journal of Nanoscience and Nanotechnology Vol. 12, 6011-6015, 2012 https://doi.org/10.1166/jnn.2012.6365

Micromachining of a Bimorph Pb(Zr,Ti)O3 (PZT) Cantilever Using a ...: Ingenta Connect

We designed and fabricated a bimorph Pb(Zr,Ti)O3 (PZT) cantilever with an integrated Si proof mass to obtain a low resonant frequency for an energy harvesting application. The cantilevers were fabricated on the micro-electromechanical systems (MEMS) scale.

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8) Moonkeun Kim, Sang-Kyun Lee, Yil Suk Yang, Jaehwa Jeong, Nam Ki Min, and Kwang-Ho Kwon, “Design and Fabrication of Vibration based Energy Harvester using Microelectrochemical System Piezoelectric Cantilever for Low Power Applications”, J. Nanosci. Nanotechnol. Vol. 13, 7932-7937, 2013 https://doi.org/10.1166/jnn.2013.8106

Design and Fabrication of Vibration Based Energy Harvester Using ...: Ingenta Connect

We fabricated dual-beam cantilevers on the microelectromechanical system (MEMS) scale with an integrated Si proof mass. A Pb(Zr,Ti)O3 (PZT) cantilever was designed as a mechanical vibration energy-harvesting system for low power applications. The resonant

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